GEC CCP Reactor, Argon Chemistry, 1D

Model ID: 8646


The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time.

The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).

Ce modèle a été construit avec les éléments suivants:

Plasma Module