Development of Micro/Nano Machines using COMSOL Multiphysics®

Shoji MARUO[1]

[1]Yokohama National University, Yokohama, Kanagawa, Japan
Publié en 2013

We have developed micro/nano machines such as optically driven micro/nano pumps and spiral-shaped piezoelectric vibration energy harvesters. COMSOL Multiphysics has been used for the design and development of the micro/nano machines. For example, optical force affected to a metallic nanowire was analyzed. Power generation of a spiral-shaped piezoelectric element was evaluated. In this presentation, the latest results will be reported in detail.

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