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MEMS capactiance pressure sensor
Posted 6 oct. 2009, 07:33 UTC−4 0 Replies
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I want to know why the capactiance pressure sensor structure is like this?
I mean why there is a hole in the dielectric,although if we use the simple structure of a capacitor,the result would become more better and the capactiance range becomes wider.
The second question is how that thin layer on the fixed electrode can be displaced by pressure changes?
Hello Amir Tabatabaei
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