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Design and Simulation of 3D MEMS Piezoelectric Gyroscope using COMSOL Multiphysics®

T.Madhuranath[1], R.Praharsha[1], Dr.K.Srinivasa Rao[1]
[1]Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India

MEMS is the leading technology which combines both electronic and mechanical devices on a single microchip. Tracing the position of the object is an important problem in engineering. This can be addressed by Gyroscopes. These sensors are used to find orientation and angular velocity.

This paper focuses on 3D MEMS Piezoelectric Gyroscope. COMSOL Multiphysics® is used for designing and simulation of the device. It uses piezoelectric effect to detect orientations.