Simulation of the Self Assembly of a Microchip on a Structured Surface using the Phase Field Method

N. Boufercha, M. Ghahremanpour, M. Schnaithmann, J. Sägebarth, and H. Sandmaier
Universität Stuttgart / IFF-MST, Nobelstr.12, Stuttgart, Germany
Publié en 2010

The presented paper describes a method for micro precision assembly of very small objects like future microchips, which have a lateral expansion equal to or smaller than 500 μm. The modelling and simulation of a fluidicbased micro assembly method for a microchip with a dimension of (500 x 500 x 100) μm3 is performed with COMSOL Multiphysics. The finite element method is used for modelling and simulation. The physical problem is modelled as a transient 2D Fluid-Structure Interaction (FSI) containing two separated fluid phases and a rigid body (microchip). The movement of the microchip is induced by the fluid and is described by the arbitrary Lagrangian-Eulerian (ALE) technique. The separated two-phase flow is modelled by using the Phase Field Method. Results from numerical analysis and simulations were evaluated.

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