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Two-axis Analysis of Micromirror Using Electrothermal Actuators For Optical Switching Applications

B.Bharanipriyaa[1], V.S.Selvakumar[1], L. Sujatha[1]
[1] National MEMS Design Center, Rajalakshmi Engineering College, Thandalam, Chennai,Tamil Nadu, India

Micro Mirrors is a versatile device which has been gaining popularity and this finds application in fields such as optical switching, display and in medical fields for non-invasive imaging. A thermally actuated mirror moves in either positive or negative directions of x and y. The ends of thermal actuators are attached to the edges of the mirror. Thus when voltage is applied to the thermal actuator, the actuator makes the attached mirror to move in either direction. In this project, we discuss about the design, analysis and actuation of mirror using four electrothermal actuators.