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3 Plate MEMS Capacitive touch sensor

Prasanna Kumar Routray

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Hello All, I'm new here and I was going through the blog on how to design and simulate the MEMS capacitive pressure sensor that is available in the following link. https://www.comsol.com/model/capacitive-pressure-sensor-476

It was nice and run well.

I was thinking of designing a 3 plate mems capacitor where I can put 2 dielectric material and simulate the same.

I'm unable to do so. Please help me. I'm attaching the geometry sequence model and also the simulation file.



0 Replies Last Post 12 juin 2021, 08:54 UTC−4
COMSOL Moderator

Hello Prasanna Kumar Routray

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