Biased Resonator Models (3D)

Model ID: 11748


An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance.

Ce modèle a été construit avec les éléments suivants:

MEMS Module MEMS Module