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How to obtain the plot of frequency shift w.r.t. pressure in a micro resonator (cc beam) based MEMS pressure sensor in COMSOL?
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Version 4.3 Version 5.6 Electromagnetics reply 5 years ago by Robert Koslover
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Version 5.3a GeneralGeometry reply 5 years ago by Jeff Hiller
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Low-Frequency ElectromagneticsRF & Microwave EngineeringWave Optics reply 5 years ago by Vittorio Bonino
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Version 5.6 MEMS & NanotechnologyPiezoelectric DevicesAcoustics & Vibrations reply 5 years ago by Aleksander Bajt
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Version 5.6 ElectromagneticsLow-Frequency ElectromagneticsGeneral reply 5 years ago by Edgar J. Kaiser