Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

Deposition rate using particle tracing module

Please login with a confirmed email address before reporting spam

Hi
I have modeled a reactor using the "fluid flow" and "particle tracing module". A substrate wafer is placed across the flow channel. I have implemented the boundary condition so that whenever a particle hits the wafer, it get stick/freeze with the wafer wall.
Now, If I want to calculate how many particles are stick with the wafer wall and rate of deposition from the result section, how I am supposed to do that?

Thank you.
Rokib

1 Reply Last Post 23 juil. 2013, 12:32 UTC−4
COMSOL Moderator

Hello Md Rokibul Islam

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.


Please login with a confirmed email address before reporting spam

Posted: 1 decade ago 23 juil. 2013, 12:32 UTC−4
Hi Rokibul,
Did you find the answer to your question. I am thinking of modeling my chemical vapor deposition process on similar lines.

Thank you,
Sanket
Hi Rokibul, Did you find the answer to your question. I am thinking of modeling my chemical vapor deposition process on similar lines. Thank you, Sanket

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.