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Pull-in Voltage for a Biased Resonator-3D

Application ID: 11748

An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance.

Ce modèle a été construit avec les éléments suivants:

MEMS Module