Tunable MEMS Capacitor
Application ID: 123
In an electrostatically tunable parallel plate capacitor, the distance between the two plates can be modified by a spring, as the applied voltage changes.
For a given voltage difference between the plates, the distance of the two plates can be computed, if the characteristics of the spring are known. Knowledge of this means that the distance between the plates can be tuned via the spring.
In this model, the electrostatic field is simulated out for a given distance.
This model is included as an example in the following products:AC/DC Module
however additional products may be needed to reproduce it. This example may be created and run using components from the following product combinations:
- COMSOL Multiphysics® and
- either the AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille de spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.