A COMSOL-based 2D Self-Consistent Microwave Plasma Model
Publié en 2015
In this paper, we present a 2D axisymmetric self-consistent plasma fluid model for microwave plasmas operating in argon. The model was developed using COMSOL Multiphysics and its Plasma Module. Plasma, flow, heat and electromagnetic equations solved self-consistently.
The effect of the pressure on the plasma parameters is studied over a wide range of pressures going from 10 mbar to atmospheric pressure. The model successfully describes the contraction of the plasma with the pressure increase. In the near future, the CO2 reduced chemistry set will be used in this model.
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