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A Study of Geometrical Shape of Central Plate in Electrostatic Actuation

K. M. V. Swamy[1], B. G. Sheeparamatti[1], G. R. Prakash [1]
[1]Department of Electronics and Communication, Basaveshwara Engineering College, Bagalkot, Karnataka, India

This study is performed to know which central plate geometry is best suited for electrostatically actuated switch. The simulation is carried out in COMSOL Multiphysics, where user is free to model the geometry without depth knowledge about geometrical dependency of electrostatic. The study of the centrally suspended geometrical models such as circle, square and rectangle suspended by two short anchors is done. It is found that rectangular central plate suspended plate shows good deflection compared to other three geometries with constant voltage between for all three geometries.