Ressources
Livres Blancs
- Bridging the Terahertz Gap
- Modeling the Lithium-Ion Battery
- Protection contre la Corrosion
- Modélisation des batteries
- Modélisation et Simulation dans le développement des piles à combustible
- Modélisation thermique des petits satellites
- Analyse électro-vibroacoustique d'un transducteur à armature équilibrée
COMSOL Multiphysics Modeling of Rotational Resonant MEMS Sensors with Electrothermal Drive
Publié en 2009
COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is sensed by stationary contacts. For cost reduction, the relatively simple, low cost SOIMUMPS fabrication process is chosen. The major limiting factors on performance are thermal response (drive mechanism) and slide film damping.

Téléchargement
- Nelson.pdf - 0.07MB