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Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology
Publié en 2015
3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are analyzed at resonance & anti-resonance frequencies. Operating frequency is from 8.7 MHz which acts as start band and 9.2 MHz as stop band. FIDT model helps in energy optimization by focusing the propagating wave more on to the poly-chemical coating. Model design used is compatible for CMOS fabrication technology & reliable in operation. This results in superior sensitivity in performance and best suits for gas sensing applications.
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- valluru_presentation.pdf - 2.04MB
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