Development and Characterization of High Frequency Bulk Mode Resonators

H. Pakdast, Z. Davis
DTU Nanotech, Technical University of Denmark, Kgs. Lyngby, Denmark
Publié en 2008

This article describes the development of a bulk mode resonator which can be employed for detection of bio/chemical species in liquids.  The goal is to understand the mechanical and electrical properties of a bulk mode resonator device which exhibit high frequency resonance modes and Q-factor. A high resonance frequency is desirable because a small change in the resonator’s mass, for example because biological molecules bind to the surface of the resonator, gives a large change in resonance frequency.  With bulk mode resonators, the resonance frequency can be dramatically increased compared to cantilevers. This improves the efficiency of the resonator allowing it to detect very small mass changes as is necessary to detect biological samples.

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