Electro-Thermal Analysis of a Micro Heater for Lab-on-Chip Applications
Publié en 2016
The Lab -on - chip (LOC) application integrates multiple functionality on a single chip which readily manipulate and delivers the result. Micro Electro Mechanical Systems (MEMS) micro heater is widely used in heating the various Lab -on-a- chip (LOC) application, which offers great accuracy, minimum power consumption and compatible to CMOS technology. This paper discusses two different design and electro thermal analysis of serpentine shaped micro heater operating at the temperature range of 150⁰C-200⁰C using COMSOL Multiphysics® software. The Micro heater design is solved using Thermal stress and Electric Current Shell solver. The design is optimized to provide uniform temperature with minimum input power.
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