FEM Based Estimation of Biological Interaction Using a Cantilever Array Sensor

S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
Published in 2011

In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending.

The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the deflection of cantilever. The value of displacement and resonant frequency are correlated to the value of physical properties of the thin film material such as young’s modulus and density.