Finite Element Simulation of a Surface Acoustic Wave Driven Linear Motor
Publié en 2015
The paper presents finite element simulation of a surface acoustic wave (SAW) linear motor. The function of SAW linear motor depends on the principle of friction drive provided by SAW propagating on a piezoelectric substrate. The SAW motor comprises of a slider driven by Rayleigh wave generated on a piezoelectric stator using an interdigital transducer (IDT) fabricated on surface of the stator. In the simulation, a lithium niobate piezoelectric substrate is used as the stator on which aluminum IDTs are fabricated at the two side ends and a cuboid slider with preload is placed in the path of SAW propagation. The characteristics of displacement, velocity, and forces acting on the slider for continuous wave excitation are studied.
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