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FSI Analysis of Microcantilevers Vibrating in Fluid Environment
Publié en 2009
Cantilever vibration in fluid environment is probably one of the most common Fluid Structure Interaction problems in the field of Micro/Nano Electro Mechanical Systems. Usually the effect of fluid on cantilever oscillation is characterized in terms of mode resonance frequencies and quality factors (Qs). In this work a new approach to the above FSI problem is proposed: modes Q factors and resonance frequencies in a viscous fluid environment are calculated through an eigenfrequency analysis thus avoiding time domain simulation as in all the previous works about a computational approach to the current problem.
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