S. L. Pinjare, V. S. Nagaraj, S. N. Savitha, S. Kesari, M. S. Sagar, and K. R. Roshan
Nitte Meenakshi Institute of Technology
The MEMS microphone is also called microphone chip or silicon microphone. The pressure sensitive diaphragm is etched directly into a silicon chip by MEMS techniques and is usually accompanied with integrated preamplifier. Most MEMS microphones are variants of the condenser microphone design. The MEMS microphone has been successfully fabricated and tested in an anechoic chamber. The microphone ...
Rachita Shettar, Dr. B G. Sheparamatti
Basaveshwar Engineering College, Bagalkot, Karanataka, India
In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...
B. Behera , H. B. Nemade , S. Trivedi ,
 Indian Institute of Technology Guwahati, Guwahati, Assam, India
The paper presents finite element simulation of a surface acoustic wave (SAW) linear motor. The function of SAW linear motor depends on the principle of friction drive provided by SAW propagating on a piezoelectric substrate. The SAW motor comprises of a slider driven by Rayleigh wave generated on a piezoelectric stator using an interdigital transducer (IDT) fabricated on surface of the stator. ...
U. Vogel , M. Spindler , S. Wege , T. Gemming 
 Leibniz Institute for Solid State and Materials, Dresden, Germany
In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL Multiphysics® software. By using the MEMS module we demonstrate 3D models with reduced geometry to achieve principle information about the wavefield. For a benchmark, a high-speed workstation with limited memory (RAM) is compared to the most potent ...
S. Gupta, T. Pahwa, R. Bansal, V. Bansal, B. Prasad, D. Kumar
Electronic Science Department Kurukshetra University, Kurukshetra, Haryana
A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. Stress distribution over different spring designs are simulated by COMSOL 3.5a using a standard comb drive with 4 movable ...
T. Kaya, B. Shiari, K. Petsch, and D. Yates
Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI
In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...
A. K. Namdeo , H. B. Nemade ,
 Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati, Assam, India
The paper presents a method of extraction of electrical equivalent circuit of a one port surface acoustic wave (SAW) resonator from the results of simulation based on finite element method (FEM) using COMSOL Multiphysics software. A one port SAW resonator consists of large number of periodic interdigital transducer (IDT) electrodes fabricated on the surface of a piezoelectric substrate. A ...
R. Karthick, S. P. K. Babu, A. R. Abirami, and S. Kalainila
Periyar Maniammai University
This paper presents the design and simulation of high sensitivity and fast response capacitive humidity sensor. Generally, the capacitive humidity sensor is made up of parallel electrode, the upper electrode being a grid with various line width and line spacing. A model is simulated using COMSOL Multiphysics. High sensitivity and fast response of the model is optimized by varying the ...
A. Arevalo , D. Conchouso , D. Castro , I. G. Foulds ,
 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Vancouver, BC, Canada
The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the evolution of the digital era. The loudspeaker design has not been changed for almost a century [1-5]. The acoustic transducer is the last analogue component needed for a true digital audio system. We want to validate the feasibility of using an ...
A. Dwivedi , G. Khanna ,
 NIT Hamirpur, Hamirpur, Himachal Pradesh, India
This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. The analysis is done using COMSOL Multiphysics®. The maximum applied acceleration was considered 1g. Human temporal bones ...