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Differential Pumping

Application ID: 14313


Differentially pumped vacuum systems use a small orifice or tube to connect two parts of a vacuum system that are at very different pressures. Such systems are necessary when processes run at higher pressures and are monitored by detectors that require UHV for operation. In this model, gas flow through a narrow tube and into a high vacuum chamber is approximated using an analytic expression for the flow rate. The model can also be adapted to use experimental data directly. The results obtained by coupling the analytic model to the free molecular flow interface are compared with a simulation that incorporates free molecular flow in both the tube and the UHV part of the system.

Ce modèle a été construit avec les éléments suivants:

Molecular Flow Module

The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product\'s capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.