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Surface Acoustic Wave Gas Sensor

Application ID: 2129


A surface acoustic wave (SAW) is an acoustic wave propagating along the surface of a solid material. Its amplitude decays rapidly, often exponentially, through the depth of the material.

SAWs are utilized in many kinds of electronic components, including filters, oscillators, and sensors. SAW devices typically apply electrodes to a piezoelectric material to convert an electric signal into a SAW, and then back again. The SAW response provides the information that the device is used to collect.

This model investigates the resonance frequencies of a SAW gas sensor. The sensor consists of an interdigitated transducer etched onto a piezoelectric substrate, covered with a thin film. The mass of the film increases as its material selectively adsorbs a chemical substance from the air. This causes a shift in resonance to a slightly lower frequency and thus information about the amount of species in the air.

Ce modèle a été construit avec les éléments suivants:

Acoustics Module MEMS Module

The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product\'s capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.