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Vibrating Micromirror with Viscous and Thermal Damping

Application ID: 14731

Micromirrors are used in certain MEMS devices to control optic elements. This model of a vibrating micromirror surrounded by air uses the Thermoacoustic-Shell Interaction user interface to model the fluid-solid interaction, and it thus includes the correct viscous and thermal damping of the mirror from the surrounding air. The resonance frequency of the mirror when under a torquing load is studied in the frequency domain by means of both frequency-response and eigenfrequency analyses. A simple RLC model is fitted to the system.

This model is included as an example in the following products:

Acoustics Module

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille de spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.