Vibrating Micromirror with Viscous and Thermal Damping: Transient Behavior
Application ID: 49481
Micromirrors are used in certain MEMS devices to control optic elements. This example of a vibrating micromirror surrounded by air uses uses the Thermoviscous Acoustics, Transient, the Shell, and the Pressure Acoustics, Transient interfaces, to model the fluid-solid interaction in the time domain.
The micromirror is initially actuated for a short time and then it exhibits damped vibrations. Using the Thermoviscous Acoustics, Transient interface, the full details of viscous and thermal damping of the mirror from the surrounding air are included.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille des spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.
