Vibrating Micromirror with Viscous and Thermal Damping: Transient Behavior
Application ID: 49481
Micromirrors are used in certain MEMS devices to control optic elements. This example model illustrates a mirror that is initially actuated for a short time and then exhibits damped vibrations.
It simulates a vibrating micromirror surrounded by air and uses the Thermoviscous Acoustics, Transient, the Shell, and the Pressure Acoustics, Transient interfaces to model the fluid-solid interaction in the time domain. Use of the Thermoviscous Acoustics interface provides full details of viscous and thermal damping of the mirror in relation to the surrounding air.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Grille de Spécifications and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.