La Bibliothèque de Modèles présente des modèles construits avec COMSOL Multiphysics pour la simulation d'une très grande variété d'applications, dans les domaines électrique, mécanique, fluidique et chimique. Vous pouvez télécharger ces modèles résolus avec leur documentation détaillée, notamment les instructions de construction pas à pas, et vous en servir comme point de départ de votre travail de simulation. Utilisez l'outil de recherche rapide pour trouver les modèles correspondant à votre domaine d'intérêt, et connectez vous avec votre compte COMSOL Access, associé à une licence COMSOL, afin de télécharger les fichiers modèles.

Knudsen Minimum

When a constant pressure difference drives flow through a narrow constriction between parallel plates (or through a cylindrical tube), the flow rate exhibits a characteristic minimum as the absolute pressure at the inlet is reduced. This phenomenon is commonly referred to as Knudsen’s minimum, and occurs as a result of the rarefaction of the gas. The observation of a minimum in flow rate for ...

Adsorption and Desorption of Water in a Load Lock Vacuum System

This model shows how to simulate the time-dependent adsorption and desorption of water in a vacuum system at low pressures. The water is introduced into the system when a gate valve to a load lock is opened and the subsequent migration and pumping of the water is modeled.

Rotating Plate in a Unidirectional Molecular Flow

This model computes the particle flux, number density and pressure on the surface of a plate that rotates in a highly directional molecular flow. The results obtained are compared with those from other, approximate, techniques for computing molecular flows.


This model shows how to compute the thickness of a thermally evaporated gold film. The thickness of the deposited film is computed both on the walls of the chamber and on the sample.

Charge Exchange Cell Simulator

A charge exchange cell consists of a region of gas at an elevated pressure within a vacuum chamber. When an ion beam interacts with the higher-density gas, the ions undergo charge exchange reactions with the gas, creating energetic neutral particles. It is likely that only a fraction of the beam ions will undergo charge exchange reactions. Therefore, in order to neutralize the beam, a pair of ...

Molecular Flow in an Ion-Implant Vacuum System

The Ion Implanter Evaluator app considers the design of an ion implantation system. Ion implantation is used extensively in the semiconductor industry to implant dopants into wafers. Within an ion implanter, ions generated within an ion source are accelerated by an electric field to achieve the desired implant energy. Ions of the correct charge state are selected by means of a separation ...

Ultra-high Vacuum, Chemical Vapor Deposition

Chemical vapor deposition (CVD) is a process often used in the Semiconductor industry to grow layers of high-purity solid material on top of a wafer substrate. CVD is achieved using many different techniques and across a range of pressures from atmospheric, to ultrahigh vacuum (UHV/CVD). UHV/CVD is performed at pressures below 10-6 Pa (10-8 Torr), so gas transport is achieved by molecular flow ...

Outgassing Pipes

This benchmark model computes the pressure in a system of outgassing pipes with a high aspect ratio. The results are compared with a 1D simulation and a Monte-Carlo simulation of the same system from the literature.

Molecular Flow Through a Microcapillary

Computing molecular flows in arbitrary geometries produces complex integral equations that are very difficult to compute analytically. Analytic solutions are, therefore, only available for simple geometries. One of the earliest problems solved was that of gas flow through tubes of arbitrary length, which was first treated correctly by Clausing. Later, the integral expressions he derived were ...

Neutralization of a Proton Beam through a Charge Exchange Cell

Gas cells have several applications in the design of scientific instruments. A gas cell is used to define a high-pressure region within the instrument's main vacuum system. For example, in this application, note we are designing a high-pressure region 100 mm long, with an operating pressure of 1e-3 Torr inside the collision cell and a main vacuum system pressure of 1e-5 Torr. In mass ...

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