ASML Advances Computing Breakthroughs with Multiphysics Modeling

Fred Huizinga, ASML, Netherlands

At ASML, the development of cutting-edge computer chips and the machinery to produce them requires a complex understanding of the many coupled physical processes involved. To design machines at this level of precision requires simulation at every step, making the availability of a comprehensive simulation toolbox invaluable. For example, engineers at ASML worked on the design of an air bearing responsible for high-precision movements in photolithography machines. They also created simulation apps to allow colleagues throughout the team to virtually test the performance of different designs.

ASML created an air bearing analysis calculator that allows engineers to input dimensions and other variables and get results, without having to specify a mesh and other model setup and postprocessing tasks.