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Prestressed Micromirror

Application ID: 372

One method of creating spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses.

The plating process can control this stress even for similar materials. One such device is the electrostatically controlled micromirror. It is typically quite small, and arrays of such devices can be implemented in projectors.

This section shows the fundamentals of how to set up and solve the lift-off of a prestressed plated devices. The model shows the use of the large deformation and initial stress features in the MEMS Module.

Ce modèle a été construit avec les éléments suivants:

MEMS Module

The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product\'s capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.