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Specification Chart

Plasma

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Module AC/DC
Module Plasma
Module RF
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Physics Interfaces and Study Types
ExpandBoltzmann Equation, Two-term Approximation
ExpandCapacitively Coupled Plasma
ExpandDC Discharge
ExpandDrift Diffusion
ExpandHeavy Species Transport
ExpandInductively Coupled Plasma1
ExpandMicrowave Plasma1
Equilibrium Discharges
ExpandCombined Inductive/DC Discharge1
ExpandEquilibrium DC Discharge
ExpandEquilibrium Inductively Coupled Plasma1
Boundary Conditions
ExpandElectrons
ExpandHeavy Species
Discretization
Finite Element
Finite Volume
Thermodynamic and Transport Property Data Import
CHEMKIN file import of thermo and transport data
Volumetric Domain Properties
1D, 2D, Axisymmetric, and 3D Formulations
Collisionless Heating
Drift Diffusion Model
Electron Production Rate
General Power Deposition
Inductive Power Deposition
Microwave Power Deposition
Reaction
Species, Non-Electron
Thermal Diffusion of Electrons
ExpandElectron Energy Distribution Function
ExpandElectron Impact Reaction
Diffusion-Models for Heavy Species Transport
Fick's Law
Mixture-Averaged
  1. Requires all indicated products